首页> 外文会议>International Symposium on Ultra Clean Processing of Silicon Surfaces(UCPSS); 20060918-20; Antwerp(BE) >Implications of the Selectiveness of Cu Chelators on Cu~0, Cu(l)O and Cu(ll)O Powders
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Implications of the Selectiveness of Cu Chelators on Cu~0, Cu(l)O and Cu(ll)O Powders

机译:Cu螯合剂选择性对Cu〜0,Cu(l)O和Cu(ll)O粉末的影响

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The time and stoichiometric ratio dependence on dissolution of Cu from Cu(I)O and Cu(II)O and metallic Cu was investigated for a series of known Cu chelators. This was monitored by ICP-OES and UV-VIS. A notable difference in the rate of reaction for Cu(I)O vs Cu(II)O was observed and the impact of a copper adduct precipitating from solution discussed as this may present a re-deposition issue for Cu surface cleaning. Additionally these chelators were found to selectively favour Cu~0 and typically showed higher solution levels of Cu when exposed to the oxides.
机译:对于一系列已知的铜螯合剂,研究了时间和化学计量比对Cu从Cu(I)O和Cu(II)O以及金属Cu中溶解的依赖性。这通过ICP-OES和UV-VIS进行监控。观察到Cu(I)O与Cu(II)O的反应速率存在显着差异,并且讨论了从溶液中析出的铜加合物的影响,因为这可能会提出铜表面清洁的再沉积问题。另外,发现这些螯合剂选择性地有利于Cu-0,并且当暴露于氧化物时通常显示出更高的Cu含量。

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