Modeling of shock wave emission during acoustically-driven cavitation-induced cleaning processes

摘要

The velocity of the shock front, emitted upon spherical acoustically-induced bubble collapse, has been calculated for different cavitation process parameters and gas state equations. The following conclusions have been reached: (1) The velocity of the shock front as a function of initial bubble radius R_0 follows the same behavior as the ratio R_(max)/R_0. (2) The velocity of the shock front increases with the amplitude of the acoustic field. (3) The state equations used for the gas inside the bubble have little impact on the velocity of the shock front. The Van der Waals law predicts a slightly higher velocity than the perfect gas law. (4) When the amplitude of the acoustic field is higher than 3 bar, the impact force generated by shock wave emission may lead to delamination of device structures.