Effect of Ozone Supply Methods on PRE in Alkaline Ozone Solutions

摘要

Ozonated DI water was supplied to make alkaline cleaning solutions to replace SCl chemicals in a bath with and without recirculation. With recirculation, low dissolved ozone and low pH cause lower particle removal efficiency (PRE) of 75%. However, direct supply of ozonated water with NH_4OH to a bath without recirculation resulted in higher PRE over 93 %.