MECHANICAL EVALUATION FOR SILICON NITRIDE SINTERED BY 28GHz MILLIMETER-WAVE HEATING

摘要

It reports the mechanical properties of the silicon nitride that sintered by the 28 GHz millimeter wave heating. Silicon nitride has many advantages, but it is difficult sintering without additives. Therefore, some oxides are used as the additives. Yb_2O_3 which, selected can expect the improvement of the mechanical properties but it is difficult to make high density. As a result, it obtained the high-density sintered bodies, with Yb_2O_3 and Al_2O_3. Sintering temperature was lower than conventional heating, which showed high strength, and very effective for the energy saving and mechanical properties improvement.