THE ATOMIC STRUCTURE OF AMORPHOUS CARBON FILMS

摘要

Mechanical properties of amorphous carbon films depend on methods and the amount of hydrogen atoms. It is necessary to clarify atomic structure and to understand the phenomena caused by the sliding friction and the mechanism. It was confirmed that an X-ray scattering of amorphous carbon thin film measured at the SPring8 can be measured to a level as accurate as 10 A~(-1). AES-EEFLS of the latter was analyzed before and after the sliding friction, and it can be interpreted that the sliding friction cause a decrease in the amount of the sp~2 bonding component or a disordering of the sp~2 bond.