HYDROGEN ABSORBING FILMS PREPARED BY ION BEAM ASSISTED DEPOSITION

摘要

In order to develop water resistant membranes that can be used in fuel cell applications, composite films comprising Zr-Mn hydrogen absorbing layers and silicon nitride overcoats were prepared by ion beam assisted deposition. Hydrogen was occluded by Zr-Mn films on preparation, through mild hydriding at room temperature under 100 kPa of hydrogen or by intensive hydriding at room temperature under 3 MPa to show different depth profiles. Peeling off of the deposited films should be minimized prior to practical use of them.