PROCESS CONTROL OF CARBON NANOTUBE FORMATION USING RF GLOW-DISCHARGE PLASMA IN STRONG MAGNETIC FIELD

摘要

The formation of uniform and well-aligned multi-walled carbon nanotubes (MWNTs) is investigated by controlling radio-frequency (rf) glow-discharge plasmas in strong magnetic field. When the magnetic field is weak (0.03 T), the MWNTs growing directly on the rf electrode are deformed by the bombardment of the high energy ions generated by the large sheath electric field in front of the rf electrode. When the strong magnetic field (2 T) is applied, on the other hand, the MWNTs are observed to be well-aligned and not to be deformed. These results can be explained by the fact that the ion bombardment energy reduces in spite of the existence of the large sheath electric field, which is caused by the magnetization of the ions in the strong magnetic field.