Framework for Structural, Processing, and Environmental Assessment of Micro to Nano Scaled Integrated Circuit Structures

摘要

Micro to nano-scaled structures are progressively being integrated into semiconductor architecture and will have a global impact on electronics, including micro and nano sized fiber membranes for electrodes, nanolaminates for trenched capacitors, or nanofiber membranes for sensing and actuating. For integrated circuits, the thrust is to provide superior functionality and structural durability without adversely impacting the environment. As micro to nano-scaled structures progress toward scalable manufacturing, it is critical to conduct fundamental investigations on assessing material composition impacts on failures and the environment. In this paper, we present and utilize a failure and life cycle assessment (FLCA) framework to evaluate chemical composition, processing parameters, structural analysis, and environmental impact properties of selected nanofiber membranes. This framework will have an impact on nanostructure integration into emerging electronic materials/devices per the International Technology Roadmap for Semiconductors (ITRS) and a transferable process for a FLCA to evaluate nanofiber technology for ICs.