Airflow numerical analysis for Class 1000 cleanroom with top supply and top return

摘要

Flow field numerical simulation is made for the top supply and top return plus lower side return pattern for a 4000 m~2 Class 1000 cleanroom to analyze the airflow distribution rule and the particles movement trail in the cleanroom so as to confirm theoretically the properties and applicability of the top supply and top return plus lower side return pattern. In addition, the impact of different spacing between outlets and different velocity on the airflow field is also discussed to provide some references for the engineering design of similar cleanrooms.