Preparation of sol-gel thin films by electrophoretic deposition

摘要

Thin films of ZrO_2, Ta_2O_5, and lead zirconate-titanate, PZT, about 100 nm to 1000 nm in thickness, were prepared by electrophoretic deposition from transparent sols obtaind by hydrolysis of metal alkoxides. Stainless steel plates and Pt-coated glass plates were used as substrates/electrodes. The constant voltage method was employed. The applied field was up to 20 V/cm. Thickness and refractive indices measurements were made by ellipsometry. The refractive indices of as-dried films were high. Uniformity of the chemical composition of PZT films, determined by electron proble microanalysis, EPMA, and Auger electron spectroscopy, AES, was better than the dip-coated PZT films, Effects of deposition conditions on physical properties of the films were discussed.