UV Generated Photocurrent from MPCVD Grown Diamond- Like Carbon Film

摘要

An UV detector is constructed out of 179 nm thick Diamond-Like Carbon (DLC) thin film grown on Si substrate in a MPCVD chamber from mixtures of CH_4,, H_2 and Ar in 1:10:94 seem ratio at 30 Torr . The substrate temperature is 600 ℃ and the growth time is 8 hours. Aluminum electrodes 100 nm thick are evaporated on to the DLC film at 30-60 urn spacing, and shined with a 10 W Philips UV fluorescence light at 300 urn distance. A Kethley 237 is used to measure the UV generated photoelectron current. We found significant UV response from DLC film, which increase with gap distance and bias. The frequency response of DLC may be tunable by adjusting the ratio between sp~2 and sp~3 ratio.