An Analytical Model for the Output Voltage of Four-terminal Silicon Pressure Transducers

摘要

The paper resolved a two-dimensional partial differential equation of transverse piezoresistive effect transducers with the method of perturbation. Relationship between the output voltage and device size has been gotten. We verified that the maximum output voltage is located at the middle point of output terminal. And then the expression of the maximum output voltage is given. The calculation results are accordant with numerical and experimental values of devices. These expressions based on the paper can be used in designs and simulations of four-terminal piezoresistive pressure transducers.