Ozone Generation with High Dielectric Materials Barrier Discharge in a Parallel-Plate System

摘要

Influences of dielectric materials on ozone generation have been experimentally investigated by considering O_2 flow rate in a barrier electric discharge for high efficiency ozone generation. The barrier discharge was produced in oxygen atmosphere using parallel-plate geometry. Ozone concentration was observed to decrease with increasing the O_2 flow rate, and higher dielectric constant, the lower ozone concentration was found. The thickness of dielectric materials played an important role for the concentration.