Investigation of the electron energy distribution in the magnetic mirror of Ar/N_2 ECR plasma

机译：Ar / N_2 ECR等离子体磁镜中电子能量分布的研究

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We have indicated so far that the application of magnetic mirror is effective to decrease the electron temperature in ECR plasmas. In this paper, the electron energy distribution (EED) in the magnetic mirror is investigated developmentally by experiment and simulation. As a result, it was found that a new simulation code we developed can predict the experimental value well.

机译：到目前为止，我们已经表明，使用电磁镜可以有效地降低ECR等离子体中的电子温度。本文通过实验和仿真研究了磁镜中的电子能量分布（EED）。结果，发现我们开发的新仿真代码可以很好地预测实验值。

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《International Conference on Phenomena in Ionized Gases(ICPIG 2003) vol.3; 20030715-20; Greifswald(DE)》|2003年|P.79|共1页
会议地点 Greifswald(DE)
作者
Hiroshi MUTA; Yoshinobu KAWAI;
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Interdisciplinary Graduate School of Engineering Sciences, Kyushu University 6-1, Kasuga-Koen, Kasuga, Fukuoka 816-8580, Japan;

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原文格式 PDF
正文语种 eng
中图分类天然气加工;
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专利

1. Investigation of the electron energy distributions in Ar/N-2 ECR plasmas with magnetic mirror [J] . Muta H, Thang DH, Kawai Y Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology . 2004,第3a4期

机译：用磁镜研究Ar / N-2 ECR等离子体中的电子能量分布
2. Electron energy distributions and electron impact source functions in Ar/N_2 inductively coupled plasmas using pulsed power [J] . Michael D. Logue, Mark J. Kushner Journal of Applied Physics . 2015,第4期

机译：使用脉冲功率在Ar / N_2电感耦合等离子体中的电子能量分布和电子冲击源功能
3. Experimental investigations of electron density and ion energy distributions in dual-frequency capacitively coupled plasmas for Ar/CF4 and Ar/O2/CF4 discharges [J] . Liu Jia, Liu Yong-Xin, Bi Zhen-Hua, Journal of Applied Physics . 2014,第1期

机译：Ar / CF4和Ar / O2 / CF4放电的双频电容耦合等离子体中电子密度和离子能量分布的实验研究
4. Investigation of the electron energy distribution in the magnetic mirror of Ar/N_(2) ECR plasma [C] . Hiroshi MUTA, Yoshinobu KAWAI, ICPIG International Conference on Phenomena in Ionized Gases . 2003

机译：AR / N_（2）ECR等离子体磁镜中电子能量分布的研究
5. Investigation of Ion and Electron Energy Distributions in Radio Frequency and Mid-frequency plasmas in Magnetron Systems. [D] . Mensah, Samuel Lartey. 2011

机译：研究磁控管系统中射频和中频等离子体中的离子和电子能量分布。
6. Electron Crescent Distributions as a Manifestation of Diamagnetic Drift in an Electron‐Scale Current Sheet: Magnetospheric Multiscale Observations Using New 7.5 ms Fast Plasma Investigation Moments [O] . A. C. Rager, J. C. Dorelli, D. J. Gershman, -1

机译：电子新月形分布作为电子尺度电流表中反磁性漂移的表现：使用新的7.5ms快速等离子体研究矩的磁层多尺度观测
7. Control of electron energy distributions and plasma characteristics of dual frequency, pulsed capacitively coupled plasmas sustained in Ar and Ar/CF4/O2 [O] . Sang-Heon Song, Mark J Kushner 2012

机译：控制电子能量分布和等离子体特性的双频，脉冲电容耦合等离子体持续，AR和AR / CF4 / O2
8. Measurement of Continuous X-Radiation and Determination of the Energy Distribution Function of High-Energy Electrons from an ECR Plasma [R] . Bernhardi, K. 1980

机译：ECR等离子体中连续X射线的测量和高能电子能量分布函数的测定

Investigation of the electron energy distribution in the magnetic mirror of Ar/N_2 ECR plasma

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