Currents of fast and slow ions to the Langmuir probe in ion-beam plasma

摘要

The mathematical model of single cylindrical Langmuir probe immersed into ion-beam plasma is built describing the dependence of currents of slow plasma ions and of fast beam ions to the probe on the basic parameters of ion-beam plasma. The model covers wide parameter range of the ion-beam plasma, particularly the whole range typical for technological ion-beam systems. For the numerical results the approximation formula is constructed, simplifying practical usage of the results. The analytical expression for the ion current (modification of the Bohm formula) is derived for the large probe limit. The theoretical results are compared to experiment.