Investigation of Double-Mode Miniature Cantilever-Type Ultrasonic Motor Using Pb-Free Array-Type Multilayer Piezoelectric Ceramics

摘要

A double-mode miniature cantilever-type ultrasonic motor was fabricated using Pb-free array-type multilayer piezoelectric ceramics (A-MLPC) of (Sr,Ca)_2NaNb_5O_(15) (SNCC) and the electrical driving properties were investigated. The A-MLPC integrated multilayer piezoelectric ceramics arrayed in a 2 × 2 matrix. The result was that the SCNN motor has shown almost the same motor-properties as ones of a Pb(Zr,Ti)O_3 based motor if the former was driven by applying 3 times higher voltage than that driving the latter. It was found that the SCNN motor was able to rotate by lithium-ion cell used in the mobile equipment without an amplifier circuit.