Microfactories: Miniaturized Flexible Production Lines for Microsystems

摘要

The manipulation and assembly of Microsystems (MEMS) require fast and accurate robots operating in clean room environment. Available systems are bulky, thus requiring large ground surface for small components. Starting from the middle of the 90' scientists and engineers have been working on a new concept at the laboratory level to give a possible answer to the problem. This concept, called "Microfactory" targets at the development of miniaturized assembly lines that can fit on a table to produce micro-components. The PocketDelta, a fast and precise micro robot working in a volume of 1 dm3 has been developed within this spirit and has now reached industrial maturity. In this paper, the status on the development of Microfactories will be presented.