Control of a Low Friction Pneumatic Actuator

摘要

In the paper, a pneumatic driven table with diaphragm cylinder is designed to decrease the friction force of the system. The measurement devices are set up to measure the characteristic of friction force. The hybrid fuzzy self tuning controller with dead-zone compensator is proposed in the paper to control position of the table. . From the experimental results, the steady state error can reach the nanometer level. A velocity feedback compensation method is also proposed to make the system more stable and accuracy.