Fabrication of High-efficiency Ultraviolet Blazed Gratings by Use of Direct Ion-beam Etching Through a Rectangular Photoresist Mask

摘要

With the direct ion-beam etching method and the etching process simulation, we have fabricated UV blazed gratings with a 1200 line/mm groove density, 4. 5° blaze angles and 1 800 line/mm groove density, 5. 5° blaze angles. Extended abstract In ultraviolet spectroscopy,there is a constant need to improve the diffraction efficiency. A blazed grating can concentrate most of the light intensity into a desired diffraction order, so it is the optimum