Laser welding station for laser fine welding of electrostatic sensitive devices with nd:YAG lasers

摘要

A flexible automated laser fine welding station using Nd:YAG lasers has been constructed. With this system it is possible to carry out highly accurate circular laser welds under clean room conditions. The laser beam is guided by means of mirrors and an optical fibre to the welding head, which includes the optics for beam shaping and focussing. The laser beam is focused or defocused onto the joining point of the material. For the fine welding and alignment process of small and electrostatic sensitive devices, such as grin lens optics, grin lens holders and laser diodes, an automated handling system has been developed. The handling system is controlled by a LabVIEW program and two motion controllers. Moreover, the alignment process of electrostatic sensitive devices and optical components can be monitored by means of an intensity sensor.