Micro actuator with two piezoelectric elements placed at right angles

摘要

This paper describes a micro actuator with two piezoelectric elements placed at right angles. Two driving methods at resonance frequency are proposed, phase-difference drive and single-phase drive. On and close degeneracy of the natural vibration modes are necessary for these methods. In this paper necessary conditions are described through kinetic models. These conditions can be controlled by mass of the tip. Theories are demonstrated through the finite element method and experimental studies.