A comparison of drive mechanisms for precision motion controlled stages

摘要

This abstract presents a comparison of two drive mechanisms, a Roh'lix~® drive and a polymer nut drive, for precision motion controlled stages. A single-axis long-range stage with a 50 mm traverse combined with a short-range stage with a 16 μm traverse at a operational bandwidth of 2.2 kHz were developed to evaluate the performance of the drives. The polymer nut and Roh'lix~® drives showed 4 nm RMS and 7 nm RMS positioning capabilities respectively, with traverses of 5 mm at a maximum velocity of 0.15 mm·s~(-1) with the short range stage operating at a 2.2 kHz bandwidth. Further results will be presented in the subsequent sections.