A Novel Piezoelectric Drive Module for Application in a Stiff and Accurate Multi-DOF Positioning System

摘要

The objective of the presented research is to develop a new concept of positioning stage preserving the stiffness through the integration of bearing, transmission and drive functions into a multi-DOF positioning system, resulting in an accurate and at the same time rigid piezoelectric positioning system. This paper describes the design and modelling of a novel drive module that combines very accurate positioning with a fast positioning mode and a virtually unlimited stroke. Driving speeds up to 0.3m/s were achieved while a position resolution down to 10nm was measured experimentally.