Self calibration method for 3D roundness of spheres using an ultraprecision coordinate measuring machine

摘要

We have reported a method to determine the absolute diameter and completely map the roundness errors of three spheres by measuring them against each other, without the need of an external reference. Such an error separation technique is important to precisely map errors of calibration references, which then serve to map the probe spheres. Thereby one can overcome the precision limit in manufacturing those references.