EFFECT OF SUBSTRATE TEMPERATURE ON THE VISIBLE LIGHT TRANSMITTANCE AND INFRARED REFLECTANCE OF LOW-E GLASS

摘要

The multi-layers configuration TiO_2/Ti/TiN/TiO_2 and TiO_2/TiN/TiO_2 on glass were prepared by DC magnetron sputtering on a heated substrate at 200℃, 250℃, 300℃ and 350℃ during deposition, respectively. The results showed that with the increase of substrate temperature, the reflectance minimum and consequently the transmittance maximum of the multi-layers without a sacrificial Ti layer are shifted towards longer wavelengths in the visible region of the spectrum, this red-shift is accompanied with a drop in infrared reflectance, but the transmittance in the visible region is higher than that of the multi-layers configuration TiO_2/Ti/TiN/TiO_2 with a sacrificial Ti layer. At the same substrate temperate the infrared reflectance of the multi-layers with a sacrificial Ti layer is higher than that without a sacrificial Ti layer. For the multi-layers configuration TiO_2/Ti/TiN/TiO_2/glass prepared on a heated substrate at 250℃, its visible transmittance as high as 68% and the infrared reflectance as high as 65% can be obtained. The quality of TiN based low-E coatings is improved by depositing a thin layer of Ti on the top of TiN layer.