Magnetic Micro Electro-mechanical Systems - Small, Robust, Versatile

摘要

Micro systems using magnetic transducer principles are utilized in a wide range of applications. Due to their small size and rugged setup, magnetic micro systems lend themselves for use as both sensors and actuators as well as in special areas like data storage. In the sensor area, a variety of physical properties, like displacement and angle, linear and angular velocity or force, torque, and pressure may be detected. In the area of microactuation, various macroscopic drive schemes lend themselves for being applied in micro devices. The Institute for Microtechnology (imt) at the Hanover University has both the experience and the means to engage in fruitful industry co-operations to fulfill industry needs in the area of magnetic micro transducers. It has over 13 years of experience in developing and fabricating magnetic microsystems and just recently moved to the Hanover University's brand new PZH, the Hanover Center for Production Technology in Garbsen (near Hanover), Germany. Examples of previous R&D activities in the sensor area are the development of magnetic field sensors as well as inductive sensors. In the area of magnetic micro actuators, the imt has applied various drive principles (variable reluctance, hybrid, asynchronous, and synchronous) to come up with linear actuators, XY stage and magnetically actuated tilting micro platforms. With these experiences and present background, the imt is extremely suitable for providing solutions for any micro magnetic device challenge.