【24h】

PREFACE

机译:前言

获取原文

摘要

The thirteenth International Symposium on Semiconductor Cleaning Science and Technology (SCST13) was held October 28-30, 2013, in San Francisco, California, USA, during the 224th Meeting of The Electrochemical Society. This series of symposia has been organized every other year since 1989. The title of this issue of ECS Transactions, as well as the symposium, has been modified, since the twelfth edition (October, 2011), from 'Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing', but its scope and overall objectives remain the same.
机译:第十三届国际半导体清洁科学与技术研讨会(SCST13)于2013年10月28日至30日在美国加州电化学学会第224次会议期间举行。此系列专题讨论会自1989年以来每两年举办一次。自第十二版(2011年10月)以来,本期《 ECS交易》以及专题讨论会的标题已从“清洁和表面处理技术半导体器件制造”,但其范围和总体目标保持不变。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号