A High Sensitivity MEMS-based Accelerometer with Reduced Cross-axis Coupling for Vibration Detection

摘要

A high sensitivity MEMS-based accelerometer with reduced cross-axis coupling is presented to achieve vibration detection. An enhanced mechanical structure topology with triangular force constraint distributing at the corners and support center is designed to reduce vibration twist along the quadrature axis. Simulation result shows that cross-axis sensitivity is decreased to -58dB by the presented topology compared with the previous work. The experimental test shows that sensitivity and noise floor of the device are about 2.3V/g and 6.4μ9/√Hz, respectively. The corresponding resolution reaches 2.8μg/√Hz. The above results prove the effectiveness of the proposed method.