This paper describes a micro optical three-axis tactile sensor capable of sensing not only vertical force but also horizontal force. The vertical force was detected from the contact area of conical feelers formed on the rubber sheet surface of an optical waveguide type tactile sensor. The horizontal force was detected from the horizontal displacement of the conical feelers. To validate the above-mentioned principle, a robot equipped with a torque-moment sensor applied several combined forces to a large sized tactile sensor surface. As indicated by the experimental results, the vertical force was specified uniquely under combined force conditions and the horizontal force was specified by modifying the relationship between the horizontal force and teh horizontal displacement on the basis of vertical force. Subsequently, a human-finger-sized tactile sensor was developed using a precise electric discharge milling machine. The sensor functioned as a precise load cell in the region below 100 mN and had the capability to sense the horizontal force.
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