Modeling and simulation analysis of infrared and visible interferometry in computer-aided alignment

摘要

Interferometry is an important means to obtain system aberration in computer-aided alignment of complex optical system, visible interferometer is usually used to measure system aberration in alignment of infrared system. In this paper, the basic principle of interferometry is analyzed firstly, and according to the feature of infrared system, the similarities and differences of infrared and visible interferometry is studied. From two aspects of different interference wavelength and different imaging device of interference fringe, the influence is analyzed in detail. Finally, the feasibility of using visible interferometry to substitute infrared interferometry to carry out computer aided alignment of infrared system is demonstrated.