The Implementation of FEM and RBF Neural Network in EIT

摘要

With the rapid development of electronic technology, semiconductor section resistivity measurement is receiving increasing attention. This paper applies electrical impedance tomography (EIT) technology to semiconductor resistivity measurements. FEM is applied to solve the EIT forward problem. Mathematical description of partial differential equation, equivalent variation differential problem, element characteristic matrix and the assembly rule of general matrix are given for calculation. To solve the EIT inverse problem, a new method of Image reconstruction algorithm based on RBF neural network is proposed. This method can well adapt to non-linear and ill-posed characteristics of EIT. The simulation experiment results indicate that the RBF algorithm can improve the reconstruction imageȁ9;s quality and the accuracy obviously.