A Novel Multi-function Tribological Probe Microscope for Characterising Surface Properties

摘要

This paper reports a novel designed multi-function Tribological Probe Microscope (TPM), which has been recently developed to provide four function measurements in a single scan arrangement. The four functions are surface topography, friction, hardness and Young's modulus of a surface. The measurement is based on a point-by-point scanning so the four measured functions are correlated, thus enables us to link these measurements with the manufacturing processes being used for optimisation. The TPM is a force-controlled scanning probe which has two precision capacitive sensors, one sensor is to measure surface topography and the deformation being made under a required loading force and the other is to measure the frictonal force between the tip and the surface being scanned. The contact force at the tip is controlled by a magnet/coil force actuator, which applies a constant force in a range of 0.01-30 mN. The topography measurement is in a range of 15 μm with a resolution of 0.1 nm. The scanning area of 100 by 100 μm is closed loop controlled with an accuracy of 1 nm. Evaluations have been carried out on some specially prepared engineered surfaces and the measured results are reported here to demonstrate the unique capability of the TPM.