Ultra-precision Manufacturing of Silicon Nitride Balls

摘要

The relationship between working parameters and surface quality of ceramic balls is discussed. New ultra-precision manufacturing technologies are also introduced, such as magnetic float polishing (MFP) and chemical mechanical polishing (CMP). They are a kind of 'gentle' process, and micro mechanical process of ceramics that removes brittle and hard materials by ductile fracture at nanometer level is realized. So, very smooth surface (Ra=4nm) and fine sphericity (0.15-0.25 μm) can be obtained, and surface damages can be minimized.