Studies on transmittance of silicon with AR coating films for IR transparent window

摘要

We investigated silicon as a promising material for a IR transparent window platform of IR(Infrared Ray) sensors withWLP(wafer level package), because silicon has advantages in price and CMOS process compatibility compared to Gewindow although Ge exhibits higher IR transmittance than Si. Having comparable transmittance to Ge is the key to usesilicon as a IR transparent window platform. We compared several types of AR coating films, SiN, SiO2, only ZnS, andGe/ZnS for finding the condition of maximizing transmittance of Si in the range of 8 ~12 um , LW-IR(Longwave IR).Also we investigated changing of transmittance for LW-IR after thermal treatments in several ambient gases and severaltemperatures.© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.