Nanogranular CoFe-yttrium-doped zirconia films for noise suppressor

摘要

Magnetic nanogranular CoFe-yttrium-doped zirconia (FeCo-YSZ) films have been deposited by radio frequency magnetron cosputtering . By simply adjusting the thickness of films, the imaginary permeability spectrum of FeCo-YSZ films changed from a resonance-type permeability spectra to a relaxation-type permeability spectra . Based on this phenomenon, Nanogranular CoFe-YSZ films with various thicknesses were deposited and the characteristics of the electromagnetic noise suppression have been evaluated using an integrated coplanar waveguide transmission line . The CoFeYSZ film of 821nm shows a very wide resonance peak with the full-width at half-maximum of 2 .8 GHz . The absorption attenuation amplitude reaches to -8 .3 dB at the resonance frequency, and is better than -6 .2 dB for the frequency above 3 .5 GHz .