Optical Failure Analysis on Pulsed Signals Embedded in Logic Cloud – A Case Study of Laser Voltage Tracing

摘要

LVx, including Laser Voltage Imaging(LVI) and Laser Voltage Probing(LVP), is an indispensable optical failure analysis tool set for design debug and yield ramp-up. Although LVI and LVP together provide a good coverage for failure analysis cases involving scan-chain functionality testing, their applicability remains limited when addressing pulsed signals from logic circuits with ever growing complexity. Laser Voltage Tracing(LVT), as a recent addition to the LVx suite, provides a global map, highlighting the active region with low duty-cycle voltage transition pattern. In this paper, we present a case study of the detection of timing abnormality for a waveform feature with 收起