Development of Quartz Resonant Temperature Sensor

摘要

Y-cut quartz resonators operating on low-frequency thickness C-mode is chosen as the temperature sensor because of its availability and good linear frequency versus temperature characteristic. In order to reduce the mounting effects and to decouple interfering modes of motion, the contour structures of the quartz wafers having a biconvex type and bat metallic electrodes with the sine ripple on the surfaces of the quartz wafer are applied. The resonance frequency characteristic is analyzed by the finite element method and the results are compared with the theoretical values whenever they are available. According to the experimental result, it is confirmed that the accuracy of measurement is better than 0.05 degree C over a wide temperature range from -60 degree C to 200 degree C.