Deposition of ZnO nanoparticles for thin-film transistors by doctor blade process

摘要

In the last years both industry and research groups paid much attention to flexible and transparent electronics. Thin-film transistors (TFTs) are the key elements for this technology being responsible for the current modulation. Their integration requires a low-cost process which is also suitable for large-area fabrication. In this paper we present an integration process for ZnO nanoparticle TFTs using a doctor blade for the semiconductor layer deposition. An inverted coplanar structure is used as well as an inverted staggered setup as transistor template with high-A nanocomposite gate dielectric. Besides the doctor bladespeed analysis, silver and gold are studied as an alternative to aluminum as drain and source contact metallization. In addition to that, the transistor's stability when stored in several ambient conditions is investigated. Therefor, alcohols like Ethanol and Isopropanol were combined with oxygen and nitrogen.