Oxygen Evolution Reaction for Ta Compound Films Prepared by Reaction Sputtering with Resintering

摘要

In order to improve catalytic activity for oxygen evolution reaction, we have investigated effect of resintering under vacuum at high temperature on activities of tantalum compound film prepared by reactive sputtering. As a result, the tantalum compound film which was prepared with resintering process after sputtering during formation of film was larger surface area than that without resintering. The tantalum compound film with resintering after sputtering was also improved for specific catalytic activity than that without resintering for the oxygen evolution reaction.