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Wide axial dynamic range digital holography using multicascade-linked synthetic wavelengths and optical wavelength

机译:使用多级联动合成波长和光学波长的宽轴向动态范围数字全息术

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摘要

Digital holography (DH) is a technique to reconstruct the amplitude and phase images of a sample by calculating thewavefront propagation from the interference image. Although DH enables three-dimensional shape measurement basedon the phase images, axial dynamic range of a single-optical-wavelength DH is limited to less than a full or half opticalwavelength due to phase wrapping ambiguity. To extend the axial range over the optical wavelength, synthesizedwavelength DH has been proposed. In this method, DH is performed at two different wavelengths, and then synthesizedwavelengths between them are used. However, use of a single longer synthesized wavelength degrades the axialresolution because the axial dynamic range is limited by the phase noise. To extend the axial dynamic range, one has toincrease the axial range while maintaining the axial resolution of sub-wavelength. One promising approach to do it iscascade linking between multiple synthetic wavelengths with different orders. In this paper, we present multicascadelinkedsynthetic wavelength DH using an optical-comb-referenced frequency synthesizer (OFS). OFS is a tunableexternal cavity laser diode phase-locked to an optical frequency comb, and is effectively used for multiple syntheticwavelengths within the range of 32 um to 1.20 m. A multiple cascade link of the phase images among an opticalwavelength and 5 different synthetic wavelengths enables the shape measurement of a reflective millimeter-sizedstepped surface with the axial resolution of 34 nm.
机译:数字全息术(DH)是一种通过从干涉图像计算波前传播来重建样本的幅度和相位图像的技术。尽管DH允许基于非相位图像进行三维形状测量,但是由于相位缠绕的模糊性,单光波长DH的轴向动态范围被限制为小于完整或一半的光学波长。为了在光波长上扩展轴向范围,已经提出了合成\ r \ n波长DH。在这种方法中,DH是在两个不同的波长下执行的,然后使用它们之间的合成波长。但是,使用单个更长的合成波长会降低轴向分辨率,因为轴向动态范围受到相位噪声的限制。为了扩展轴向动态范围,必须在保持亚波长的轴向分辨率的同时增大轴向范围。一种可行的方法是在具有不同阶数的多个合成波长之间级联链接。在本文中,我们介绍了使用光梳参考频率合成器(OFS)的多级联动\ r \合成波长DH。 OFS是锁相到光学频率梳的可调谐\ r \外部腔激光二极管,可有效用于32 um至1.20 m范围内的多个合成\ n波长。光学波长和5种不同的合成波长之间的相位图像的多个级联链接使得能够测量轴向分辨率为34 nm的反射毫米大小的台阶表面的形状。

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    Graduate School of Technology, Industrial and Social Sciences, Tokushima University, 2-1, Minami-Josanjima, Tokushima, Tokushima 770-8506, Japan JST, ERATO, MINOSHIMA Intelligent Optical Synthesizer Project, 2-1, Minami-Josanjima, Tokushima, Tokushima 770-8506, Japan;

    Graduate School of Technology, Industrial and Social Sciences, Tokushima University, 2-1, Minami-Josanjima, Tokushima, Tokushima 770-8506, Japan JST, ERATO, MINOSHIMA Intelligent Optical Synthesizer Project, 2-1, Minami-Josanjima, Tokushima, Tokushima 770-8506, Japan;

    Graduate School of Advanced Technology and Science, Tokushima University, 2-1, Minami-Josanjima, Tokushima, Tokushima 770-8506, Japan College of Sciences and Technology, University of Bordeaux, 351 cours de la Libération, Talence Cedex 33405, France;

    JST, ERATO, MINOSHIMA Intelligent Optical Synthesizer Project, 2-1, Minami-Josanjima, Tokushima, Tokushima 770-8506, Japan Graduate School of Advanced Technology and Science, Tokushima University, 2-1, Minami-Josanjima, Tokushima, Tokushima 770-8506, Japan;

    Graduate School of Technology, Industrial and Social Sciences, Tokushima University, 2-1, Minami-Josanjima, Tokushima, Tokushima 770-8506, Japan JST, ERATO, MINOSHIMA Intelligent Optical Synthesizer Project, 2-1, Minami-Josanjima, Tokushima, Tokushima 770-8506, Japan Engineering and Surface Metrology Laboratory, National Institute of Standards, Tersa St., El haram, El Giza, Egypt;

    Faculty of Science and Technology, Tokushima University, 2-1, Minami-Josanjima, Tokushima, Tokushima 770-8506, Japan;

    JST, ERATO, MINOSHIMA Intelligent Optical Synthesizer Project, 2-1, Minami-Josanjima, Tokushima, Tokushima 770-8506, Japan Graduate School of Advanced Technology and Science, Tokushima University, 2-1, Minami-Josanjima, Tokushima, Tokushima 770-8506, Japan;

    JST, ERATO, MINOSHIMA Intelligent Optical Synthesizer Project, 2-1, Minami-Josanjima, Tokushima, Tokushima 770-8506, Japan Graduate School of Advanced Technology and Science, Tokushima University, 2-1, Minami-Josanjima, Tokushima, Tokushima 770-8506, Japan;

    Graduate School of Technology, Industrial and Social Sciences, Tokushima University, 2-1, Minami-Josanjima, Tokushima, Tokushima 770-8506, Japan JST, ERATO, MINOSHIMA Intelligent Optical Synthesizer Project, 2-1, Minami-Josanjima, Tokushima, Tokushima 770-8506, Japan;

    Laboratoire Ondes et Matiere d’Aquitaine, CNRS UMR 5798, Bordeaux University, Bordeaux Cedex 33000, France;

    JST, ERATO, MINOSHIMA Intelligent Optical Synthesizer Project, 2-1, Minami-Josanjima, Tokushima, Tokushima 770-8506, Japan Graduate School of Engineering, Osaka University, 2-1, Yamadaoka, Suita, Osaka 565-0871, Japan;

    Graduate School of Technology, Industrial and Social Sciences, Tokushima University, 2-1, Minami-Josanjima, Tokushima, Tokushima 770-8506, Japan JST, ERATO, MINOSHIMA Intelligent Optical Synthesizer Project, 2-1, Minami-Josanjima, Tokushima, Tokushima 770-8506, Japan;

    JST, ERATO, MINOSHIMA Intelligent Optical Synthesizer Project, 2-1, Minami-Josanjima, Tokushima, Tokushima 770-8506, Japan Center for Optical Research and Education, Utsunomiya University, 7-1-2, Yoto, Utsunomiya, Tochigi 321-8585, Japan;

    JST, ERATO, MINOSHIMA Intelligent Optical Synthesizer Project, 2-1, Minami-Josanjima, Tokushima, Tokushima 770-8506, Japan Graduate School of Informatics and Engineering, The University of Electro-Communications, 1-5-1 Chofugaoka, Chofu, Tokyo 182-8585, Japan;

    Graduate School of Technology, Industrial and Social Sciences, Tokushima University, 2-1, Minami-Josanjima, Tokushima, Tokushima 770-8506, Japan JST, ERATO, MINOSHIMA Intelligent Optical Synthesizer Project, 2-1, Minami-Josanjima, Tokushima, Tokushima 770-8506, Japan;

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