Integration of micro-optical elements with top-end of fibers via focused ion beam direct fabrication

摘要

Integration of micro-optical elements (MOEs) with optical fiber at top-end was realized by use of focused ion beam (FIB) direct milling. The designed MOEs (micro-refractive lens, micro-diffractive lens with continuous relief, and micro-gratings) were directly milled by the FIB with ion energy and ion beam current of 40 keV and 569 pA, respectively, in the core area of both single mode fiber and multimode finer for dispersion and focusing uses. The integrated fibers can be used in microspectrometer, optical fiber sensors, and micro-optical systems for biochemistry analysis.