High-power microwave frequency modulated KrF laser

摘要

Abstract: We report on the development of a 260 mJ 248 nm KrF laser with 98.7% depth of modulation at 1.3 GHz and 77% depth of modulation at 2.6 GHz using a 1.3 GHz microwave source driving a Pockel's cell. Subsequent single-pass amplification of the modulated KrF source to the $QTR@-joule level is shown to be straight forward with no noticeable degradation of the modulation depth. !0