Fraunhofer Institute for Electronic Nano Systems, Technology Campus 3, 09126 Chemnitz, Germany;
Chemnitz Univ. of Technology, Center for Microtechnologies, Reichenhainer Str. 70, 09126 Chemnitz, Germany;
Fraunhofer Institute for Electronic Nano Systems, Technology Campus 3, 09126 Chemnitz, Germany;
Fraunhofer Institute for Electronic Nano Systems, Technology Campus 3, 09126 Chemnitz, Germany;
Infratec GmbH, Gostritzer Str. 61-63, 01217 Dresden, Germany;
Infratec GmbH, Gostritzer Str. 61-63, 01217 Dresden, Germany;
Infratec GmbH, Gostritzer Str. 61-63, 01217 Dresden, Germany;
AMO Gmbh, Otto-Blumenthal-Strasse 25, 52074 Aachen, Germany;
Fraunhofer Institute for Electronic Nano Systems, Technology Campus 3, 09126 Chemnitz, Germany;
Subwavelength grating; Fabry-Perot Interferometer; Tunable filter;
机译:基于MEMS的滤波器集成可调式法布里 - 珀罗腔和光栅
机译:集成光栅和可调法布里-珀罗腔的基于MEMS的微滤波器设计
机译:具有可变孔径MEMS反射器的可调光带通滤波器
机译:具有亚波长光栅反射器的可调谐Fabry-Perot干涉仪,用于MWIR显微光谱仪
机译:在长波长红外区域中基于MEMS的可调谐法布里 - 珀罗干涉仪滤波器的设计,仿真,制造和表征
机译:在电介质亚波长光栅中使用对称保护模式的垂直入射滤波器
机译:在AlgaAs / GaAs中的高反射率空气桥亚波长光栅反射器和法布里 - 珀罗腔