Abstract: In this paper, the new method on evaluating and measuring roughness of optical surface by CCD camera is presented. The microstructure of surface of samples studied is revealed by a replication technique. The electron photomicrographs of one surface replication of each sample is obtained at two magnification. We note that a grained structure is presented due to residual rough grooves from polishing process. The electron photomicrographs of optical surface is scanned and analyzed by CCD camera-microcomputer system. The corresponding surface profiles are displayed at CRT of microcomputer system, with X-axis corresponding the micrograph spatial coordinate and Y-axis corresponding the micrograph density (i.e. roughness of the real surface). The above-mentioned method has both good vertical and lateral resolution (0.1 - 1.0 nm) due to using CCD camera scanner, but a poor lateral one (100 - 1000 nm) by classical interferometer method. The new method has availability for evaluating and testing optical and supersmooth surface.!5
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