Advanced research on nonlinearity in heterodyne interferometer

摘要

Recent development of research on the nonlinearity of the heterodyne interferometers provides an approach to eliminate the nonlinearity of heterodyne interferometer using a simple phase compensation system by rotating a polarizer which is set up before the detector in the interferometer. This paper shows the experiment results which proved its general validity for elimination of the nonlinearity errors whether it is a first-order or a higher-order error. It explains which accuracy can be expected and provides the application opportunities based on theoretical analyses and experiment results.