A laser measurement system with multi-degree-of-freedom

摘要

A new five-degree-of-freedom measuring system was developed as a linear guide. According to the principle of autocollimation, the system consisted of two semiconductor lasers, two right angle prisms, two lenses, two polarization spectroscopes and four quadrant Si—photoelectric detectors(QPD). Two axial displacements and three angular rotation degrees are measured by comparing the position of the spot center on the QPD. Repetitive simulations show that the accuracy of the system is 3" for measurement of angle, which proves the feasibility of this system. The advantages of the system include simple structure, easy operation, high accuracy, low cost and real-time work.