PARTNERSHIPS TO ADDRESS EHS ASPECTS OF CHEMICAL MANAGEMENT IN THE SEMICONDUCTOR INDUSTRY: LESSONS FROM THE PFAS EXPERIENCE

摘要

The semiconductor industry utilizes chemicals in virtually every step of the device manufacturing process. Both suppliers and users (device manufacturers) of these chemicals maintain a strong commitment to Responsible Care whose purpose is to make environmental health and safety (EHS) an integral part of a product's life cycle - from manufacture, marketing and distribution to use, recycling and disposal. Successful management of EHS issues associated with new and existing chemicals in the semiconductor industry requires a close partnership between chemical suppliers and device manufacturers. This partnership allows a comprehensive industry response to information which may surface throughout the product lifecycle based on new studies, or new analytical capability, raising EHS concerns which must be addressed through proper risk assessment. On October 18, 2000, the U.S. Environmental Protection Agency (EPA) issued a Proposed Significant New Use Rule (SNUR) covering 90 Perfluorooctyl Sulfonates (PFOS) and other fully fluorinated alkyl sulfonates (PFAS). This paper discusses the PFAS issue to date, the industry impact and response developed through close partnership of SEMI and SIA members to address EPA concerns while maintaining focus on the needs of the industry. The lessons learned from this successful partnership suggest a model for dealing with future chemical management issues.