首页> 外文会议>Fifteenth International Symposium on Chemical Vapor Deposition, May 14-18, 2000, Toronto, Ontario >MEASUREMENT OF THE KINETICS OF THE HIGH TEMPERATURE OXIDATION OF TiCl_4
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MEASUREMENT OF THE KINETICS OF THE HIGH TEMPERATURE OXIDATION OF TiCl_4

机译:TiCl_4高温氧化动力学的测定

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We measure the kinetics of TiCl_4 kinetics at high temperatures using a batch reactor consisting of a gas mixture (typically 0.3% TiCl_4 in Ar) confined by a piston in a cylinder. The gas in the reactor is compressed at different conditions to achieve peak temperatures ranging between 800 K to 1450 K with reaction times of 20-150 ms. We analyze the gas mixture before and after compression using Fourier transform infrared (FTIR) spectroscopy to determine the fractional conversion of the TiCl_4 reagent. Assuming first order pyrolysis kinetics, a model for interpreting the fractional conversion of TiCl_4 is developed. Regressing the data to the model yields an activation energy of 13.8 kcal/mole K and A = 9324 s~(-1). The model does not explain the variations in the data satisfactorily (R~2 = 0.47), and we conclude that TiCl_4 pyrolysis is not first order as commonly believed (1-3).
机译:我们使用分批反应器测量TiCl_4动力学在高温下的动力学,该分批反应器由气体混合物(通常为0.3%TiCl_4在Ar中)限制在气缸中的活塞组成。反应器中的气体在不同条件下被压缩,以达到800 K至1450 K的峰值温度,反应时间为20-150 ms。我们使用傅里叶变换红外(FTIR)光谱分析压缩前后的气体混合物,以确定TiCl_4试剂的分数转化率。假设一级热解动力学,建立了一个解释TiCl_4的分数转化的模型。将数据回归到模型产生的活化能为13.8 kcal / mole K,A = 9324 s〜(-1)。该模型不能令人满意地解释数据的变化(R〜2 = 0.47),我们得出的结论是,通常认为TiCl_4热解不是一阶的(1-3)。

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