QUASI-THERMODYNAMIC MODELS OF SURFACE CHEMISTRY: APPLICATION TO MOVPE OF III-V TERNARY COMPOUNDS

摘要

A quasi-thermodynamic approach is applied to analyze surface processes in MOVPE of ternary III-V compounds. A new mechanism of competitive arsenic and phosphorus incorporation into GaAsP, AlAsP and InAsP is suggested based on the assumption that low sticking probability of P_4 and AsP_3 is responsible for suppression of phosphorus incorporation. This kinetic effect competes with a natural thermodynamic trend of increasing arsenic content in the row AlAsP →?> GaAsP → InAsP. A good agreement is achieved between the computational results and experimental observations supporting the model assumptions.