Design considerations for high-power industrial excimer lasers

机译：大功率工业受激准分子激光器的设计注意事项

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Abstract: The Siemens excimer laser is designed for industrial scale production processes. Its unique features are liquid dielectric capacitors, side-wise x-ray preionization, efficient cross flow gas circulation and an all metal/ceramic discharge head. All parts are integrated inside a hermetically sealed pressure vessel.!

机译：摘要：西门子准分子激光器是为工业规模生产过程设计的。它的独特功能是液体介电电容器，横向X射线预电离，有效的错流气体循环和全金属/陶瓷放电头。所有零件都集成在一个密封的压力容器内。

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来源
《Excimer Lasers and Applications III》|1991年|p.48-52|共5页
会议地点 The Hague(NL);The Hague(NL);The Hague(NL)
作者
Heinz-Leonard Jetter; Siemens AG; Karlstein am Main; Federal Republic of Germany.;
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正文语种 eng
中图分类无线电电子学、电信技术;
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2. Design consideration and performance of high-power and high-brightness InGaAs-InGaAsP-AlGaAs quantum-well diode lasers (Λ=0.98 Μm) [J] . Yang G.W., Hwu R.J., Xu Z.T., IEEE journal of selected topics in quantum electronics . 2000,第4期

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4. Design considerations for high-power industrial excimer lasers [C] . Heinz-Leonard Jetter Conference on excimer lasers and applications . 1991

机译：高功率工业准分子激光器的设计考虑因素
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机译：高功率铜蒸气激光器的工业应用

Design considerations for high-power industrial excimer lasers

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